1.55-μm Si-based MOEMS optical tunable filter
| Data(s) |
2003
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| Resumo |
A prototype 1.55-μm Si-based micro-opto-electro-mechanical-systems (MOEMS) tunable filter is fabricated, employing surface micromachining technology. Full-width-at-half-maximum (FWHM) of the transmission spectrum is 23 nm. The tuning range is 30 nm under 50-V applied voltage. The device can be readily integrated with resonant cavity enhanced (RCE) detector and vertical cavity surface emitting laser (VCSEL) to fabricate tunable active devices. A prototype 1.55-μm Si-based micro-opto-electro-mechanical-systems (MOEMS) tunable filter is fabricated, employing surface micromachining technology. Full-width-at-half-maximum (FWHM) of the transmission spectrum is 23 nm. The tuning range is 30 nm under 50-V applied voltage. The device can be readily integrated with resonant cavity enhanced (RCE) detector and vertical cavity surface emitting laser (VCSEL) to fabricate tunable active devices. 于2010-11-23批量导入 zhangdi于2010-11-23 13:06:37导入数据到SEMI-IR的IR Made available in DSpace on 2010-11-23T05:06:37Z (GMT). No. of bitstreams: 1 4777.pdf: 320296 bytes, checksum: 6f3c7f74b651ea003e606742f8bedf32 (MD5) Previous issue date: 2003 Institute of Semiconductors,Chinese Academy of Sciences |
| Identificador | |
| Idioma(s) |
英语 |
| Fonte |
Zuo Yuhua;Huang Changjun;Cheng Buwen;Cai Xiao;Mao Kewei;Li Chuanbo;Luo Liping;Gao Junhua;Bai Yunxia;Jiang Lei;Ma Chaohua;Zhu Jialian;Wang Liangchen;Yu Jinzhong;Wang Qiming.1.55-μm Si-based MOEMS optical tunable filter,Chinese Optics Letters,2003,1(9):528-531 |
| Palavras-Chave | #光电子学 |
| Tipo |
期刊论文 |
