Polarization-Insensitive Silica on Silicon Arrayed Waveguide Grating Design
Data(s) |
2004
|
---|---|
Resumo |
A new technology for fabrication of silica on silicon arrayed waveguide grating (AWG) based on deep etching and thermal oxidation is presented.Using this method,a silicon layer is remained at the side of waveguide.The stress distribution and effective refractive index of waveguide fabricated by this approach are calculated using finite element and finite difference beam propagation method,respectively.The results of these studies indicate that the stress of silica on silicon optical waveguide can be matched in parallel and vertical direction and AWG polarization dependent wavelength (PDλ) can be reduced effectively due to side-silicon layer. A new technology for fabrication of silica on silicon arrayed waveguide grating (AWG) based on deep etching and thermal oxidation is presented.Using this method,a silicon layer is remained at the side of waveguide.The stress distribution and effective refractive index of waveguide fabricated by this approach are calculated using finite element and finite difference beam propagation method,respectively.The results of these studies indicate that the stress of silica on silicon optical waveguide can be matched in parallel and vertical direction and AWG polarization dependent wavelength (PDλ) can be reduced effectively due to side-silicon layer. 于2010-11-23批量导入 zhangdi于2010-11-23 13:05:47导入数据到SEMI-IR的IR Made available in DSpace on 2010-11-23T05:05:47Z (GMT). No. of bitstreams: 1 4662.pdf: 393327 bytes, checksum: adbe4d0bfefdf05b8f6a12935d0b9e1e (MD5) Previous issue date: 2004 国家重点基础研究发展规划,国家高技术研究发展计划,国家自然科学基金 R&D Center for Optoelectonics,Institute of Semiconductors,The Chinese Academy of Sciences 国家重点基础研究发展规划,国家高技术研究发展计划,国家自然科学基金 |
Identificador | |
Idioma(s) |
英语 |
Fonte |
An Junming;Li Jian;Gao Dingshan;Xia Junlei;Li Jiangang;Wang Hongjie;Hu Xiongwei.Polarization-Insensitive Silica on Silicon Arrayed Waveguide Grating Design,半导体学报,2004,25(11):1360-1363 |
Palavras-Chave | #光电子学 |
Tipo |
期刊论文 |