Fabrication of 1.55μm Si-Based Resonant Cavity Enhanced Photodetectors
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2005
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Resumo |
A novel bonding method using silicate gel as bonding medium is developed.High reflective SiO2/Si mirrors deposited on silicon substrates by e-beam deposition are bonded to the active layers at a low temperature of 350℃ without any special treatment on bonding surfaces.The reflectivities of the mirrors can be as high as 99.9%.A Si-based narrow band response InGaAs photodetector is successfully fabricated,with a quantum efficiency of 22.6% at the peak wavelength of 1.54μm,and a full width at half maximum of about 27nm.This method has a great potential for industry processes. A novel bonding method using silicate gel as bonding medium is developed.High reflective SiO2/Si mirrors deposited on silicon substrates by e-beam deposition are bonded to the active layers at a low temperature of 350℃ without any special treatment on bonding surfaces.The reflectivities of the mirrors can be as high as 99.9%.A Si-based narrow band response InGaAs photodetector is successfully fabricated,with a quantum efficiency of 22.6% at the peak wavelength of 1.54μm,and a full width at half maximum of about 27nm.This method has a great potential for industry processes. 于2010-11-23批量导入 zhangdi于2010-11-23 13:05:06导入数据到SEMI-IR的IR Made available in DSpace on 2010-11-23T05:05:06Z (GMT). No. of bitstreams: 1 4561.pdf: 235568 bytes, checksum: e6e8fd44730f7e49f1f60f77481ed71d (MD5) Previous issue date: 2005 国家重点基础研究发展规划,国家自然科学基金,国家高技术研究发展计划 Institute of Semiconductors, Chinese Academy of Sciences;Beijing Chemical Plant 国家重点基础研究发展规划,国家自然科学基金,国家高技术研究发展计划 |
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Idioma(s) |
英语 |
Fonte |
Mao Rongwei;Zuo Yuhua;Li Chuanbo;Cheng Buwen;Teng Xuegong;Luo Liping;Zhang Heshun;Yu Jinzhong;Wang Qiming.Fabrication of 1.55μm Si-Based Resonant Cavity Enhanced Photodetectors,半导体学报,2005,26(2):271-275 |
Palavras-Chave | #光电子学 |
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期刊论文 |