Recent Progress in Silicon Electro-optic Modulators for High Speed Applications

Silicon-based high-speed electro-optical modulator is the key component of silicon photonics for future communiction and interconnection systems. In this paper, introduced are the optical mudulation mechanisms in silicon, reviewed are some recent progresses in high-speed silicon modulators, and analyzed are advantages and shortages of the silicon modulators of different types.

National Basic Research Program of China("973" Project, 2 7CB6134 5 and 2 6CB3 28 3),"863" National High Technology Programme of China(2 6AA 3Z424)