ALGORITHM METHOD OF CORRELATION POSITION FOR AUTOMATIC ALIGNMENT IN MICROCIRCUIT FABRICATION

Autoria(s): WANG XD; DU BC; WANG L; WU GW; GE H
Data(s)

1995
Identificador

http://ir.semi.ac.cn/handle/172111/15553

http://www.irgrid.ac.cn/handle/1471x/101815
Idioma(s)

英语
Fonte

WANG XD; DU BC; WANG L; WU GW; GE H .ALGORITHM METHOD OF CORRELATION POSITION FOR AUTOMATIC ALIGNMENT IN MICROCIRCUIT FABRICATION ,JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,1995,13(3):858-861
Palavras-Chave #半导体物理 #BEAM LITHOGRAPHY
Tipo

期刊论文
Acesso ao item digital