INPLANE X-RAY-SCATTERING OF EPITAXIAL STRUCTURES
| Data(s) |
1995
|
|---|---|
| Resumo |
A new approach for in-plane X-ray scattering from the cleavages of epitaxial films or superlattices, where the scattering vectors are parallel to the interfaces, is proposed. This method can be employed to determine directly the in-plane X-ray strains and other atomic registry along the interfaces of the epitaxial structures. |
| Identificador | |
| Idioma(s) |
英语 |
| Fonte |
CUI SF; WANG YT; ZHUANG Y; LI M; MAI ZH .INPLANE X-RAY-SCATTERING OF EPITAXIAL STRUCTURES ,JOURNAL OF CRYSTAL GROWTH,1995,152(4):354-358 |
| Palavras-Chave | #半导体材料 #STRAIN RELAXATION #HETEROEPITAXIAL LAYERS #DEVICE STRUCTURES #ROCKING CURVES #SUPERLATTICES #DIFFRACTION #HETEROSTRUCTURES #MISFIT |
| Tipo |
期刊论文 |
