HIGH-EFFICIENCY TOP SURFACE-EMITTING LASERS FABRICATED BY 4 IMPLANTATION USING TUNGSTEN WIRE AS MASK


Autoria(s): LIU Y; ZHANG XB; JIANG XY; LIU SP; LI XN; DU GT; GAO DS; LIN SI; KANG XJ; GAO HH; GAO JH; WANG HJ
Data(s)

1995

Resumo

We report the results of a high efficiency room temperature continuous wave (cw) vertical-cavity surface-emitting laser. The structure is obtained by four deep H+ implantation using tungsten wires as the mask. The fabrication process is the simplest ever reported in vertical-cavity surface-emitting laser fabrication. The largest differential quantum efficiency of 65% and maximum cw light output power over 4 mW have been achieved for the 15X15 mu m(2) device. (C) 1995 American Institute of Physics.

We report the results of a high efficiency room temperature continuous wave (cw) vertical-cavity surface-emitting laser. The structure is obtained by four deep H+ implantation using tungsten wires as the mask. The fabrication process is the simplest ever reported in vertical-cavity surface-emitting laser fabrication. The largest differential quantum efficiency of 65% and maximum cw light output power over 4 mW have been achieved for the 15X15 mu m(2) device. (C) 1995 American Institute of Physics.

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CHINESE ACAD SCI,INST SEMICOND,BEIJING 100083,PEOPLES R CHINA

Identificador

http://ir.semi.ac.cn/handle/172111/15477

http://www.irgrid.ac.cn/handle/1471x/101777

Idioma(s)

英语

Fonte

LIU Y; ZHANG XB; JIANG XY; LIU SP; LI XN; DU GT; GAO DS; LIN SI; KANG XJ; GAO HH; GAO JH; WANG HJ .HIGH-EFFICIENCY TOP SURFACE-EMITTING LASERS FABRICATED BY 4 IMPLANTATION USING TUNGSTEN WIRE AS MASK ,APPLIED PHYSICS LETTERS ,1995,67(24):3549-3550

Palavras-Chave #光电子学
Tipo

期刊论文