HIGH-EFFICIENCY TOP SURFACE-EMITTING LASERS FABRICATED BY 4 IMPLANTATION USING TUNGSTEN WIRE AS MASK
Data(s) |
1995
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Resumo |
We report the results of a high efficiency room temperature continuous wave (cw) vertical-cavity surface-emitting laser. The structure is obtained by four deep H+ implantation using tungsten wires as the mask. The fabrication process is the simplest ever reported in vertical-cavity surface-emitting laser fabrication. The largest differential quantum efficiency of 65% and maximum cw light output power over 4 mW have been achieved for the 15X15 mu m(2) device. (C) 1995 American Institute of Physics. We report the results of a high efficiency room temperature continuous wave (cw) vertical-cavity surface-emitting laser. The structure is obtained by four deep H+ implantation using tungsten wires as the mask. The fabrication process is the simplest ever reported in vertical-cavity surface-emitting laser fabrication. The largest differential quantum efficiency of 65% and maximum cw light output power over 4 mW have been achieved for the 15X15 mu m(2) device. (C) 1995 American Institute of Physics. 于2010-11-17批量导入 zhangdi于2010-11-17 14:17:02导入数据到SEMI-IR的IR Made available in DSpace on 2010-11-17T06:17:02Z (GMT). No. of bitstreams: 1 7073.pdf: 53953 bytes, checksum: defad554104ec1c4d103931246c95522 (MD5) Previous issue date: 1995 CHINESE ACAD SCI,INST SEMICOND,BEIJING 100083,PEOPLES R CHINA |
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Idioma(s) |
英语 |
Fonte |
LIU Y; ZHANG XB; JIANG XY; LIU SP; LI XN; DU GT; GAO DS; LIN SI; KANG XJ; GAO HH; GAO JH; WANG HJ .HIGH-EFFICIENCY TOP SURFACE-EMITTING LASERS FABRICATED BY 4 IMPLANTATION USING TUNGSTEN WIRE AS MASK ,APPLIED PHYSICS LETTERS ,1995,67(24):3549-3550 |
Palavras-Chave | #光电子学 |
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期刊论文 |