Analysis of Dopant distributions in LEC-InP


Autoria(s): Wei J
Data(s)

1995

Resumo

It is often important to be able to estimate the concentration of dopant atoms incorporated into InP crystals grown from InP melt of given composition. In this paper we present a simple parameter (G) to revise the commonly used effective distribution coefficient (k(eff)) and the Scheil equation. The results obtained for various dopants and different initial concentrations in LEC-grown InP ingots are discussed. It is shown that the revised dopant concentration curves tally with the real distributions.

Identificador

http://ir.semi.ac.cn/handle/172111/15461

http://www.irgrid.ac.cn/handle/1471x/101769

Idioma(s)

英语

Fonte

Wei J .Analysis of Dopant distributions in LEC-InP ,CRYSTAL RESEARCH AND TECHNOLOGY,1995,30(8):1169-1178

Palavras-Chave #半导体材料 #DIFFUSION #GROWTH #ZN
Tipo

期刊论文