Determination of AlxGa1-xAs Auger sensitivity factors
Data(s) |
1996
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Resumo |
AlxGa1-xAs Auger sensitivity factors have been determined by using PHI610 scanning Auger microprobe with pure elemental standards Al, Ag and matrix GaAs. The quantitative results of AlxGa1-xAs measured by the present method are in very good agreement with X-ray double crystal measurements. it is shown that by using sensitivity factors obtained from the self-instrument, the accuracy of the quantitative AES analysis can be considerably improved compared with that using elemental relative sensitivity factors given by the PHI handbook or internal standard method. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
Chen WD; Cui YD .Determination of AlxGa1-xAs Auger sensitivity factors ,APPLIED SURFACE SCIENCE ,1996,100(0):156-159 |
Palavras-Chave | #半导体材料 #ELECTRON SPECTROSCOPY |
Tipo |
期刊论文 |