Liquid encapsulated-melt zone processing of GaAs
Data(s) |
1996
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Resumo |
A liquid encapsulated melt Bone process has been developed for single crystal growth of GaAs. Single crystals of 40 mm long have been grown with this technique. To avoid unwanted nucleation events and maintain a constant crystal diameter, from top to bottom growth using a short zone with a convex zone surface was found to give the best results. An arsenic overpressure was used to in conjunction with a B2O3 encapsulant in order to suppress arsenic dissociation from the melt and maintain the stoichiometry of the crystal. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
Zhou BJ; Chen WH; Jensen E; Amini A; Abbaschian R .Liquid encapsulated-melt zone processing of GaAs ,CHINESE PHYSICS LETTERS,1996,13(12):950-952 |
Palavras-Chave | #半导体材料 |
Tipo |
期刊论文 |