Liquid encapsulated-melt zone processing of GaAs


Autoria(s): Zhou BJ; Chen WH; Jensen E; Amini A; Abbaschian R
Data(s)

1996

Resumo

A liquid encapsulated melt Bone process has been developed for single crystal growth of GaAs. Single crystals of 40 mm long have been grown with this technique. To avoid unwanted nucleation events and maintain a constant crystal diameter, from top to bottom growth using a short zone with a convex zone surface was found to give the best results. An arsenic overpressure was used to in conjunction with a B2O3 encapsulant in order to suppress arsenic dissociation from the melt and maintain the stoichiometry of the crystal.

Identificador

http://ir.semi.ac.cn/handle/172111/15277

http://www.irgrid.ac.cn/handle/1471x/101533

Idioma(s)

英语

Fonte

Zhou BJ; Chen WH; Jensen E; Amini A; Abbaschian R .Liquid encapsulated-melt zone processing of GaAs ,CHINESE PHYSICS LETTERS,1996,13(12):950-952

Palavras-Chave #半导体材料
Tipo

期刊论文