POST-HYDROGENATION AND ION-IMPLANTATION DOPING OF LPCVD A-SI

Autoria(s): LIAO XB; KONG GL; WANG PD; CHAO YQ; LIU CL
Data(s)

1982
Identificador

http://ir.semi.ac.cn/handle/172111/14811

http://www.irgrid.ac.cn/handle/1471x/101440
Idioma(s)

英语
Fonte

LIAO XB; KONG GL; WANG PD; CHAO YQ; LIU CL.POST-HYDROGENATION AND ION-IMPLANTATION DOPING OF LPCVD A-SI,SOLAR ENERGY MATERIALS,1982,6(2):147-150
Palavras-Chave #半导体材料
Tipo

期刊论文
Acesso ao item digital