IMPURITY DOPING PHOSPHORUS BY ELECTRON-BEAM


Autoria(s): LI XQ; SUN HL; WANG PD
Data(s)

1984

Identificador

http://ir.semi.ac.cn/handle/172111/14767

http://www.irgrid.ac.cn/handle/1471x/101418

Idioma(s)

英语

Fonte

LI XQ; SUN HL; WANG PD.IMPURITY DOPING PHOSPHORUS BY ELECTRON-BEAM,CHINESE PHYSICS ,1984,4(3):710-713

Palavras-Chave #半导体物理
Tipo

期刊论文