CHANNELING ANALYSIS OF SELF-IMPLANTED AND RECRYSTALLIZED SILICON ON SAPPHIRE
| Data(s) |
1986
|
|---|---|
| Identificador | |
| Idioma(s) |
英语 |
| Fonte |
FAN RY; YU YH; YIN SD; LIN LY.CHANNELING ANALYSIS OF SELF-IMPLANTED AND RECRYSTALLIZED SILICON ON SAPPHIRE,NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS,1986,15(0):350-351 |
| Palavras-Chave | #半导体材料 |
| Tipo |
期刊论文 |
