SI-CL BONDS IN A-SI-H-CL FILMS

Autoria(s): WANG ZP; HAN HX; ZHAO XS; LI GH
Data(s)

1986
Identificador

http://ir.semi.ac.cn/handle/172111/14701

http://www.irgrid.ac.cn/handle/1471x/101385
Idioma(s)

英语
Fonte

WANG ZP; HAN HX; ZHAO XS; LI GH.SI-CL BONDS IN A-SI-H-CL FILMS,SOLID STATE COMMUNICATIONS ,1986,58(10):709-711
Palavras-Chave #半导体材料
Tipo

期刊论文
Acesso ao item digital