CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY OF SILICON LSI CIRCUITS AND JOSEPHSON JUNCTION DEVICES


Autoria(s): DU AY; CHU YM
Data(s)

1987

Identificador

http://ir.semi.ac.cn/handle/172111/14623

http://www.irgrid.ac.cn/handle/1471x/101346

Idioma(s)

英语

Fonte

DU AY; CHU YM.CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY OF SILICON LSI CIRCUITS AND JOSEPHSON JUNCTION DEVICES,JOURNAL OF ELECTRON MICROSCOPY TECHNIQUE,1987,7(4):319-322

Palavras-Chave #半导体器件
Tipo

期刊论文