CW ARGON-LASER-INDUCED ZONE-MELTING RECRYSTALLIZATION OF THIN SILICON ON OXIDE


Autoria(s): XU QX; RYSSEL H; GOTZLICH J; STEINBERGER H
Data(s)

1988

Identificador

http://ir.semi.ac.cn/handle/172111/14579

http://www.irgrid.ac.cn/handle/1471x/101324

Idioma(s)

英语

Fonte

XU QX; RYSSEL H; GOTZLICH J; STEINBERGER H.CW ARGON-LASER-INDUCED ZONE-MELTING RECRYSTALLIZATION OF THIN SILICON ON OXIDE,JOURNAL OF CRYSTAL GROWTH ,1988,88(3):383-390

Palavras-Chave #半导体材料
Tipo

期刊论文