OPTICAL-PROPERTIES OF SPUTTERED A1N FILMS AND COATED GAAS

Autoria(s): DEHUANG W; GUO LA
Data(s)

1988
Identificador

http://ir.semi.ac.cn/handle/172111/14577

http://www.irgrid.ac.cn/handle/1471x/101323
Idioma(s)

英语
Fonte

DEHUANG W; GUO LA.OPTICAL-PROPERTIES OF SPUTTERED A1N FILMS AND COATED GAAS,THIN SOLID FILMS,1988,158(2):L39-L43
Palavras-Chave #半导体材料
Tipo

期刊论文
Acesso ao item digital