FORMATION OF TISI2 AND SHALLOW JUNCTION BY AS+ ION-BEAM MIXING AND INFRARED RAPID HEAT-TREATMENT
| Data(s) |
1989
|
|---|---|
| Identificador | |
| Idioma(s) |
英语 |
| Fonte |
MIN Y; LIN HW; TSIEN PH; ZHANG JP; YIN SD.FORMATION OF TISI2 AND SHALLOW JUNCTION BY AS+ ION-BEAM MIXING AND INFRARED RAPID HEAT-TREATMENT,IEEE TRANSACTIONS ON ELECTRON DEVICES,1989,36(3):514-521 |
| Palavras-Chave | #半导体器件 |
| Tipo |
期刊论文 |
