MEV HE MICROBEAM ANALYSIS OF A SEMICONDUCTOR INTEGRATED-CIRCUIT

Autoria(s): ZHU PR; LIU JR; ZHANG JP; YIN SD
Data(s)

1989
Identificador

http://ir.semi.ac.cn/handle/172111/14499

http://www.irgrid.ac.cn/handle/1471x/101284
Idioma(s)

英语
Fonte

ZHU PR; LIU JR; ZHANG JP; YIN SD.MEV HE MICROBEAM ANALYSIS OF A SEMICONDUCTOR INTEGRATED-CIRCUIT,VACUUM ,1989,39(0):151-152
Palavras-Chave #半导体器件
Tipo

期刊论文
Acesso ao item digital