THE EFFECT OF THERMAL-TREATMENT ON THE THIN-FILM REACTION OF LA, CE, AND ND ON SILICON SURFACES


Autoria(s): HSU CC; WANG YX; HU J; HO J; QIAN JJ
Data(s)

1989

Identificador

http://ir.semi.ac.cn/handle/172111/14473

http://www.irgrid.ac.cn/handle/1471x/101271

Idioma(s)

英语

Fonte

HSU CC; WANG YX; HU J; HO J; QIAN JJ.THE EFFECT OF THERMAL-TREATMENT ON THE THIN-FILM REACTION OF LA, CE, AND ND ON SILICON SURFACES,JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,1989,7(5):3016-3022

Palavras-Chave #半导体材料
Tipo

期刊论文