THE PASSIVATING EFFECT OF SI(100)-AS SURFACE AND THE ADSORPTION OF OXYGEN


Autoria(s): ZHONG ZT; WANG DW; FAN Y; LI CF
Data(s)

1989

Identificador

http://ir.semi.ac.cn/handle/172111/14467

http://www.irgrid.ac.cn/handle/1471x/101268

Idioma(s)

英语

Fonte

ZHONG ZT; WANG DW; FAN Y; LI CF.THE PASSIVATING EFFECT OF SI(100)-AS SURFACE AND THE ADSORPTION OF OXYGEN,JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,1989,7(5):1084-1089

Palavras-Chave #半导体材料
Tipo

期刊论文