ELIMINATION OF STACKING-FAULTS IN A SILICON EPITAXIAL LAYER OF (100) ORIENTATION BY HEAT-TREATMENT


Autoria(s): CAI TH
Data(s)

1990

Identificador

http://ir.semi.ac.cn/handle/172111/14401

http://www.irgrid.ac.cn/handle/1471x/101235

Idioma(s)

英语

Fonte

CAI TH.ELIMINATION OF STACKING-FAULTS IN A SILICON EPITAXIAL LAYER OF (100) ORIENTATION BY HEAT-TREATMENT,JOURNAL OF APPLIED PHYSICS,1990,67(11):7176-7178

Palavras-Chave #半导体材料
Tipo

期刊论文