ELIMINATION OF STACKING-FAULTS IN A SILICON EPITAXIAL LAYER OF (100) ORIENTATION BY HEAT-TREATMENT
Data(s) |
1990
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Identificador | |
Idioma(s) |
英语 |
Fonte |
CAI TH.ELIMINATION OF STACKING-FAULTS IN A SILICON EPITAXIAL LAYER OF (100) ORIENTATION BY HEAT-TREATMENT,JOURNAL OF APPLIED PHYSICS,1990,67(11):7176-7178 |
Palavras-Chave | #半导体材料 |
Tipo |
期刊论文 |