AUGER CRATER-EDGE PROFILING OF MULTILAYER THIN-FILMS BY SCANNING AUGER-SPECTROSCOPY
| Data(s) |
1990
|
|---|---|
| Identificador | |
| Idioma(s) |
英语 |
| Fonte |
WANG YX; CUI YD; CHEN ZG; LAMBERS E; HOLLOWAY PH.AUGER CRATER-EDGE PROFILING OF MULTILAYER THIN-FILMS BY SCANNING AUGER-SPECTROSCOPY,JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,1990,8(3):2241-2245 |
| Palavras-Chave | #半导体材料 |
| Tipo |
期刊论文 |
