AN ALUMINUM OXYNITRIDE FILM
| Data(s) |
1991
|
|---|---|
| Resumo |
We report on an aluminum oxynitride (AlON) film which was successfully made using the reactiver r.f. sputtering method in an N2-O2 mixture. The fabrication process, atomic components, breakdown field and refractive index of the AlON film are shown in detail. The AlON film is a new polyfilm combining the good properties of Al2O3 and AlN, and it is very interesting with regard to optoelectronic devices and integrated optic circuits. |
| Identificador | |
| Idioma(s) |
英语 |
| Fonte |
DEHUANG W; LIANG G.AN ALUMINUM OXYNITRIDE FILM,THIN SOLID FILMS,1991,198(0):207-210 |
| Palavras-Chave | #半导体材料 #AL2O3 |
| Tipo |
期刊论文 |
