STUDY OF TI/LNP INTERFACE BY PES


Autoria(s): JI MR; WU JX; MA MS; LIU XM; LI BQ; XU ZJ
Data(s)

1992

Resumo

The interface of Ti/InP(110) was studied by X-ray photoelectron spectroscopy (XPS) and ultraviolet photoelectron spectroscopy (UPS). It is evident that deposition of Ti on the surface of InP(110) at room temperature introduced a break of the In-P bond and a diffusion of In atoms into the Ti film. The interaction of Ti and P occurred at a temperature of 350-degrees-C.

Identificador

http://ir.semi.ac.cn/handle/172111/14177

http://www.irgrid.ac.cn/handle/1471x/101123

Idioma(s)

英语

Fonte

JI MR; WU JX; MA MS; LIU XM; LI BQ; XU ZJ.STUDY OF TI/LNP INTERFACE BY PES,VACUUM ,1992,43(11):1157-1158

Palavras-Chave #半导体材料 #INP(110)
Tipo

期刊论文