MATRIX DESCRIPTION OF DYNAMIC HOLZ DIFFRACTION TESTED ON THE STRAINED LAYER SUPERLATTICE SI/GESI
Data(s) |
1992
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Resumo |
A matrix formulation has been developed and applied to simulate large-angle convergent-beam electron diffraction (LACBED) patterns from the Si/GexSi1-x strained layer superlattice (SLS). Good quantitative agreement has been achieved between experimental and simulated patterns. By utilizing dynamical HOLZ line patterns, we demonstrate that an accuracy of better than 0.1% can be achieved in the determination of the averaged lattice constant of a SLS, and the averaged number of layers of atoms within one period of SLS can be determined up to a single monolayer. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
WANG SQ; PENG LM; DUAN XF; CHU YM.MATRIX DESCRIPTION OF DYNAMIC HOLZ DIFFRACTION TESTED ON THE STRAINED LAYER SUPERLATTICE SI/GESI,ULTRAMICROSCOPY,1992,45(0):405-409 |
Palavras-Chave | #半导体材料 #ELECTRON-DIFFRACTION |
Tipo |
期刊论文 |