EFFECT OF SURFACE-STRUCTURES UPON ULTRATHIN-FILM INTERFERENCE-FRINGES
Data(s) |
1993
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Resumo |
Effect of surface structures upon ultrathin film interference fringes generated from extremely thin films or epitaxial layers grown on semiconductor wafers has been studied. Since dark regions of fringes correspond to the places where the thin films are destroyed or absent, the fringes are investigated to detect uneven surfaces with undesired structures. Therefore, surface microstructures can be detected and characterized effectively by the modification of the fringes. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
LU TJ; OGAWA T; TOYODA K; WANG ZG.EFFECT OF SURFACE-STRUCTURES UPON ULTRATHIN-FILM INTERFERENCE-FRINGES,JOURNAL OF MATERIALS RESEARCH,1993,8(9):2315-2318 |
Palavras-Chave | #半导体材料 |
Tipo |
期刊论文 |