Fabrication of grating waveguides based on Nano-imprint lithography and silicon mould replication techniques.
Data(s) |
2004
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Identificador | |
Fonte |
Liu Yueming;田维坚.Fabrication of grating waveguides based on Nano-imprint lithography and silicon mould replication techniques..见:.,,2004,211-218 |
Tipo |
会议论文 |