Fabrication of grating waveguides based on Nano-imprint lithography and silicon mould replication techniques.


Autoria(s): Liu Yueming(刘雪明); Tiang Weijian(田维坚)
Data(s)

2004

Identificador

http://ir.opt.ac.cn/handle/181661/7916

http://www.irgrid.ac.cn/handle/1471x/71424

Fonte

Liu Yueming;田维坚.Fabrication of grating waveguides based on Nano-imprint lithography and silicon mould replication techniques..见:.,,2004,211-218

Tipo

会议论文