Surface morphology and defects of polycrystalline silicon thin film

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Autoria(s): Hu YF(胡芸菲); Guo ZQ(郭志球); Liu XY(柳锡运)

Data(s)	06/08/2010
Identificador	http://ir.giec.ac.cn/handle/344007/3189 http://www.irgrid.ac.cn/handle/1471x/68801
Fonte	胡芸菲;郭志球;柳锡运.Surface morphology and defects of polycrystalline silicon thin film.见：.,,,
Tipo	会议论文