Design and Characterization of Evanescently Coupled Uni-Traveling Carrier Photodiodes with a Multimode Diluted Waveguide Structure


Autoria(s): Zhang YX (Zhang Yun-Xiao); Pan JQ (Pan Jiao-Qing); Zhao LJ (Zhao Ling-Juan); Zhu HL (Zhu Hong-Liang); Wang W (Wang Wei)
Data(s)

2010

Resumo

A new evanescently coupled uni-traveling carrier photodiode (EC-UTC-PD) is designed, fabricated and characterized, which incorporates a multimode diluted waveguide structure and UTC active waveguide structure together. A high responsivity of 0.68A/W at 1.55-mu m without an anti-reflection coating, a linear photocurrent responsivity of more than 21 mA, and a large-1 dB vertical alignment tolerance of 2.5 mu m are achieved.

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National High-Tech Research and Development Program of China 2007AA03Z417 2006AA01Z256 2007AA03Z419; National Key Basic Research Program of China 2006CB604901 2006CB604902

其它

National High-Tech Research and Development Program of China 2007AA03Z417 2006AA01Z256 2007AA03Z419; National Key Basic Research Program of China 2006CB604901 2006CB604902

Identificador

http://ir.semi.ac.cn/handle/172111/11157

http://www.irgrid.ac.cn/handle/1471x/66210

Idioma(s)

英语

Fonte

Zhang YX (Zhang Yun-Xiao),Pan JQ (Pan Jiao-Qing),Zhao LJ (Zhao Ling-Juan),Zhu HL (Zhu Hong-Liang),Wang W (Wang Wei).Design and Characterization of Evanescently Coupled Uni-Traveling Carrier Photodiodes with a Multimode Diluted Waveguide Structure.CHINESE PHYSICS LETTERS, 27 (2): Art. No. 028501 FEB 2010,2010,27(2):Art. No. 028501

Palavras-Chave #半导体材料 #I-N PHOTODIODE #HIGH RESPONSIVITY #HIGH-SPEED #OPTIMIZATION #FABRICATION
Tipo

期刊论文