立方相碳化硅高量程微机械加速度计研究
| Contribuinte(s) |
孙国胜 |
|---|---|
| Data(s) |
2010
|
| Resumo |
Submitted by 阎军 (yanj@red.semi.ac.cn) on 2010-06-07T01:08:53Z No. of bitstreams: 1 立方相碳化硅高量程微机械加速度计研究.pdf: 2551518 bytes, checksum: c103d007add79adccfc0be58903561c6 (MD5) Approved for entry into archive by 阎军(yanj@red.semi.ac.cn) on 2010-06-07T01:23:51Z (GMT) No. of bitstreams: 1 立方相碳化硅高量程微机械加速度计研究.pdf: 2551518 bytes, checksum: c103d007add79adccfc0be58903561c6 (MD5) Made available in DSpace on 2010-06-07T01:23:51Z (GMT). No. of bitstreams: 1 立方相碳化硅高量程微机械加速度计研究.pdf: 2551518 bytes, checksum: c103d007add79adccfc0be58903561c6 (MD5) Previous issue date: 2010 |
| Identificador | |
| Idioma(s) |
中文 |
| Fonte |
杨挺.立方相碳化硅高量程微机械加速度计研究[硕士].北京.中国科学院研究生院.2010 |
| Palavras-Chave | #半导体材料 |
| Tipo |
学位论文 |
