Synthesis of GaN nanorods with vertebra-like morphology


Autoria(s): Gao, HY (Gao, Haiyong); Li, JM (Li, Jinmin)
Data(s)

2006

Resumo

GaN nanorods with vertebra-like morphology were synthesized by nitriding Ga2O3/ZnO films at 1000 degrees C for 20min. Ga2O3 thin films and ZnO middle layers were pre-deposited in turn on Si(111) substrates by r.f. magnetron sputtering system. In the flowing ammonia ambient, ZnO was reducted to Zn and Zu sublimated at 1000 degrees C. Ga2O3 was reducted to Ga2O and Ga2O reacted with NH3 to synthesize GaN nanorods in the help of the sublimation of Zn. The structure and morphology of the nanorods were studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM), The composition of GaN nanorods was studied by energy dispersive spectroscopy (EDS) and fourier transform infrared (FTIR) system.

GaN nanorods with vertebra-like morphology were synthesized by nitriding Ga2O3/ZnO films at 1000 degrees C for 20min. Ga2O3 thin films and ZnO middle layers were pre-deposited in turn on Si(111) substrates by r.f. magnetron sputtering system. In the flowing ammonia ambient, ZnO was reducted to Zn and Zu sublimated at 1000 degrees C. Ga2O3 was reducted to Ga2O and Ga2O reacted with NH3 to synthesize GaN nanorods in the help of the sublimation of Zn. The structure and morphology of the nanorods were studied by X-ray diffraction (XRD) and scanning electron microscopy (SEM), The composition of GaN nanorods was studied by energy dispersive spectroscopy (EDS) and fourier transform infrared (FTIR) system.

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IEEE.

Chinese Acad Sci, Inst Semicond, Novel Mat Dept, Beijing 100083, Peoples R China

IEEE.

Identificador

http://ir.semi.ac.cn/handle/172111/9824

http://www.irgrid.ac.cn/handle/1471x/65913

Idioma(s)

英语

Publicador

IEEE

345 E 47TH ST, NEW YORK, NY 10017 USA

Fonte

Gao, HY (Gao, Haiyong); Li, JM (Li, Jinmin) .Synthesis of GaN nanorods with vertebra-like morphology .见:IEEE .2006 1st IEEE International Conference on Nano/Micro Engineered and Molecular Systems,345 E 47TH ST, NEW YORK, NY 10017 USA ,2006,Vols 1-3: 196-199

Palavras-Chave #半导体材料 #GaN nanorods #Ga2O3/ZnO films #nitritding #morphology #CHEMICAL-VAPOR-DEPOSITION #FILMS
Tipo

会议论文