Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab

We report on the design and fabrication of a photonic crystal (PC) channel drop filter based on an asymmetric silicon-on-insulator (SOI) slab. The filter is composed of two symmetric stick-shape micro-cavities between two single-line-defect (W1) waveguides in a triangular lattice, and the phase matching condition for the filter to improve the drop efficiency is satisfied by modifying the positions and radii of the air holes around the micro-cavities. A sample is then fabricated by using electron beam lithography (EBL) and inductively coupled plasma (ICP) etching processes. The measured 0 factor of the filter is about 1140, and the drop efficiency is estimated to be 73% +/- 5% by fitting the transmission spectrum.

We report on the design and fabrication of a photonic crystal (PC) channel drop filter based on an asymmetric silicon-on-insulator (SOI) slab. The filter is composed of two symmetric stick-shape micro-cavities between two single-line-defect (W1) waveguides in a triangular lattice, and the phase matching condition for the filter to improve the drop efficiency is satisfied by modifying the positions and radii of the air holes around the micro-cavities. A sample is then fabricated by using electron beam lithography (EBL) and inductively coupled plasma (ICP) etching processes. The measured 0 factor of the filter is about 1140, and the drop efficiency is estimated to be 73% +/- 5% by fitting the transmission spectrum.

zhangdi于2010-03-09批量导入

zhangdi于2010-03-09批量导入

Natl Steering Comm Nanotechnol.; Natl Ctr Nanosci Technol.; Minist Sci & Technol China.; Natl Nat Sci Fdn China.; Minist Educ China.; Chinese Acad Sci.; China Assoc Sci & Technol.

[Yu, Hejun] Beijing Univ Posts & Telecommun, Minist Educ, Key Lab Opt Commun & Lightwave Technol, Beijing 100876, Peoples R China; [Yu, Hejun; Yu, Jinzhong; Yu, Yude; Chen, Shaowu] Chinese Acad Sci, State Key Lab Integrated Optoelect, Inst Semicond, Beijing 100083, Peoples R China

Natl Steering Comm Nanotechnol.; Natl Ctr Nanosci Technol.; Minist Sci & Technol China.; Natl Nat Sci Fdn China.; Minist Educ China.; Chinese Acad Sci.; China Assoc Sci & Technol.