Accurate vibration detection of a rough surface - art. no. 683118
| Data(s) |
2008
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| Resumo |
Based on the semiconductor laser whose spectral line with width is compressed to be less than 1.2Mhz, a system was designed to measure and improve the amplitude and frequency of the real-time microvibration with sinusoidal modulation. real-time microvibration measurement was executed without alignment problem in the interferometry; and low-frequency disturbance of environment could be eliminated. Suggestions were also given to consummate the system. The system also has resistance against the low frequency disturbance of the environment. Based on the semiconductor laser whose spectral line with width is compressed to be less than 1.2Mhz, a system was designed to measure and improve the amplitude and frequency of the real-time microvibration with sinusoidal modulation. real-time microvibration measurement was executed without alignment problem in the interferometry; and low-frequency disturbance of environment could be eliminated. Suggestions were also given to consummate the system. The system also has resistance against the low frequency disturbance of the environment. zhangdi于2010-03-09批量导入 Made available in DSpace on 2010-03-09T02:11:55Z (GMT). No. of bitstreams: 1 683.pdf: 223348 bytes, checksum: 5de468dfbd4084297fa8f3d3c983db79 (MD5) Previous issue date: 2008 SPIE.; Chinese Opt Soc. [Zeng, Hualin; Zhou, Yan; Fan, Songtao; He, Jun] Chinese Acad Sci, Inst Semicond, Beijing 100864, Peoples R China SPIE.; Chinese Opt Soc. |
| Identificador | |
| Idioma(s) |
英语 |
| Publicador |
SPIE-INT SOC OPTICAL ENGINEERING 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA |
| Fonte |
Zeng, HL ; Zhou, Y ; Fan, ST ; He, J .Accurate vibration detection of a rough surface - art. no. 683118 .见：SPIE-INT SOC OPTICAL ENGINEERING .NANOPHOTONICS,NANOSTRUCTURE,AND NANOMETROLOGY II,1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA ,2008,6831: 83118-83118 |
| Palavras-Chave | #光电子学 #measurement of microvibration #nanometrology #interferometry #vibration detection |
| Tipo |
会议论文 |
