Realization of SOI submicrometer optical waveguide components - art. no. 68380L
| Data(s) |
2008
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| Resumo |
Submicrometer channel and rib waveguides based on SOI (Silicon-On-Insulator) have been designed and fabricated with electron-beam lithography and inductively coupled plasma dry etching. Propagation loss of 8.39dB/mm was measured using the cut-back method. Based on these so-called nanowire waveguides, we have also demonstrated some functional components with small dimensions, including sharp 90 degrees bends with radius of a few micrometers, T-branches, directional couplers and multimode interferometer couplers. Submicrometer channel and rib waveguides based on SOI (Silicon-On-Insulator) have been designed and fabricated with electron-beam lithography and inductively coupled plasma dry etching. Propagation loss of 8.39dB/mm was measured using the cut-back method. Based on these so-called nanowire waveguides, we have also demonstrated some functional components with small dimensions, including sharp 90 degrees bends with radius of a few micrometers, T-branches, directional couplers and multimode interferometer couplers. zhangdi于2010-03-09批量导入 zhangdi于2010-03-09批量导入 SPIE.; Chinese Opt Soc. [Xu, Xuejun; Chen, Shaowu; Yu, Jinzhong; Tu, Xiaoguang] Chinese Acad Sci, Inst Semicond, State Key Lab Optoelect, Beijing 100083, Peoples R China SPIE.; Chinese Opt Soc. |
| Identificador | |
| Idioma(s) |
英语 |
| Publicador |
SPIE-INT SOC OPTICAL ENGINEERING 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA |
| Fonte |
Xu, XJ ; Chen, SW ; Yu, JZ ; Tu, XG .Realization of SOI submicrometer optical waveguide components - art. no. 68380L .见：SPIE-INT SOC OPTICAL ENGINEERING .OPTOELECTRONIC DEVICES AND INTEGRATION II,1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA ,2008,6838: L8380-L8380 |
| Palavras-Chave | #光电子学 #silicon-on-insulator |
| Tipo |
会议论文 |
