High Q microring resonator in silicon-on-insulator rib waveguides - art. no. 68380J
Data(s) |
2008
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Resumo |
A high quality (Q) factor microring resonator in silicon-on-insulator rib waveguides was fabricated by electron beam lithography, followed by inductively coupled plasma etching. The waveguide dimensions were scaled down to submicron, for a low bending loss and compactness. Experimentally, the resonator has been realized with a quality factor as high as 21,200, as well as a large extinction ratio 12.5dB at telecommunication wavelength near 1550nm. From the measured results, propagation loss in the rib waveguide is determined as low as 6.900/cm. This high Q microring resonator is expected to lead to high speed optical modulators and bio-sensing devices. A high quality (Q) factor microring resonator in silicon-on-insulator rib waveguides was fabricated by electron beam lithography, followed by inductively coupled plasma etching. The waveguide dimensions were scaled down to submicron, for a low bending loss and compactness. Experimentally, the resonator has been realized with a quality factor as high as 21,200, as well as a large extinction ratio 12.5dB at telecommunication wavelength near 1550nm. From the measured results, propagation loss in the rib waveguide is determined as low as 6.900/cm. This high Q microring resonator is expected to lead to high speed optical modulators and bio-sensing devices. zhangdi于2010-03-09批量导入 Made available in DSpace on 2010-03-09T02:11:54Z (GMT). No. of bitstreams: 1 677.pdf: 332177 bytes, checksum: 693feecea2c1a6d47be9c959b0e2c812 (MD5) Previous issue date: 2008 SPIE.; Chinese Opt Soc. [Huang, Qingzhong; Yu, Jinzhong; Chen, Shaowu; Xu, Xuejun; Han, Weihua; Fan, Zhongchao] Chinese Acad Sci, Inst Semicond, Natl Key Lab Integrated Optoelect, Beijing 100083, Peoples R China SPIE.; Chinese Opt Soc. |
Identificador | |
Idioma(s) |
英语 |
Publicador |
SPIE-INT SOC OPTICAL ENGINEERING 1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA |
Fonte |
Huang, QZ ; Yu, JZ ; Chen, SW ; Xu, XJ ; Han, WH ; Fan, ZC .High Q microring resonator in silicon-on-insulator rib waveguides - art. no. 68380J .见:SPIE-INT SOC OPTICAL ENGINEERING .OPTOELECTRONIC DEVICES AND INTEGRATION II,1000 20TH ST, PO BOX 10, BELLINGHAM, WA 98227-0010 USA ,2008,6838: J8380-J8380 |
Palavras-Chave | #光电子学 #resonator #silicon-on-insulator #quality factor #propagation loss |
Tipo |
会议论文 |