Heteroepitaxy of cubic GaN: influence of interface structure
Data(s) |
1997
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Resumo |
We report on the epitaxial growth and the microstructure of cubic GaN. The layers are deposited by plasma-assisted molecular beam epitaxy on GaAs and Si substrates. Despite the extreme lattice mismatch between these materials, GaN grows in the metastable cubic phase with a well-defined orientation-relationship to the GaAs substrate including a sharp heteroboundary. The preference of the metastable phase and its epitaxial orientation originates in the interface structure which is found to be governed by a coincidence site lattice. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
Trampert A; Brandt O; Yang H; Yang B; Ploog KH .Heteroepitaxy of cubic GaN: influence of interface structure ,MICROSCOPY OF SEMICONDUCTING MATERIALS 1997,1997,157(0):205-208 |
Palavras-Chave | #半导体物理 #MOLECULAR-BEAM EPITAXY #GAN/GAAS(001) #GROWTH |
Tipo |
期刊论文 |