High-concentration hydrogen in unintentionally doped GaN


Autoria(s): Zhang JP; Wang XL; Sun DZ; Li XB; Kong MY
Data(s)

1998

Resumo

We use nuclear reaction analysis to study hydrogen in unintentionally doped GaN, and high-concentration hydrogen, nearly 10(21) cm(-3), is detected. Accordingly, a broad but intense infrared absorption zone with a peak at 2962 cm(-1) is reported, which is tentatively assigned to the stretch mode of NH: Ga complex. The complex is assumed to be one candidate answering for background electrons in unintentionally doped GaN. (C) 1998 Elsevier Science B.V. All rights reserved.

Identificador

http://ir.semi.ac.cn/handle/172111/13172

http://www.irgrid.ac.cn/handle/1471x/65556

Idioma(s)

英语

Fonte

Zhang JP; Wang XL; Sun DZ; Li XB; Kong MY .High-concentration hydrogen in unintentionally doped GaN ,JOURNAL OF CRYSTAL GROWTH ,1998,189(0):566-569

Palavras-Chave #半导体材料 #gallium nitride #gas source molecular beam epitaxy #hydrogen #autodoping #FILMS
Tipo

期刊论文