Stability investigation of cubic GaN films grown by metalorganic chemical vapor deposition on GaAs (001)


Autoria(s): Sun XL; Yang H; Zheng LX; Xu DP; Li JB; Wang YT; Li GH; Wang ZG
Data(s)

1999

Resumo

The thermal stability of cubic-phase GaN (c-GaN) films are investigated by photoluminescence (PL) and Raman scattering spectroscopy. C-GaN films are grown on GaAs (001) substrates by metalorganic chemical vapor deposition. PL measurements show that the near-band-edge emissions in the as-grown GaN layers and thermally treated samples are mainly from c-GaN. No degradation of the optical qualities is observed after thermal annealing. Raman scattering spectroscopy shows that the intensity of the E-2 peak from hexagonal GaN grains increases with annealing temperature for the samples with poor crystal quality, while thermal annealing up to 1000 degrees C has no obvious effect on the samples with high crystal quality. (C) 1999 American Institute of Physics. [S0003-6951(99)04719-1].

Identificador

http://ir.semi.ac.cn/handle/172111/12920

http://www.irgrid.ac.cn/handle/1471x/65430

Idioma(s)

英语

Fonte

Sun XL; Yang H; Zheng LX; Xu DP; Li JB; Wang YT; Li GH; Wang ZG .Stability investigation of cubic GaN films grown by metalorganic chemical vapor deposition on GaAs (001) ,APPLIED PHYSICS LETTERS,1999,74(19):2827-2829

Palavras-Chave #半导体物理 #RAMAN-SPECTROSCOPY #PHASE #PHONONS
Tipo

期刊论文