A comprehensive abatement technology for arsine, phosphorus, sulfur, fluorine, chlorine, oxynitrides and heavy metals in semiconductor industry waste water and gases
| Data(s) |
2000
|
|---|---|
| Identificador | |
| Idioma(s) |
英语 |
| Fonte |
Wen RM .A comprehensive abatement technology for arsine, phosphorus, sulfur, fluorine, chlorine, oxynitrides and heavy metals in semiconductor industry waste water and gases ,CHINESE JOURNAL OF ELECTRONICS,2000,9(1):11-11 |
| Palavras-Chave | #半导体器件 |
| Tipo |
期刊论文 |
