Influences of initial buffer layer deposition on electrical and optical properties in cubic GaN grown on GaAs(100) by metalorganic chemical vapor deposition


Autoria(s): Xu DP; Yang H; Li JB; Li SF; Zhao DG; Wang YT; Sun XL; Wu RH
Data(s)

2000

Resumo

We present some results on the effect of initial buffer layer on the crystalline quality of Cubic GaN epitaxial layers grown on GaAs(100) substrates by metalorganic chemical vapor deposition. Photoluminescence and Hall measurements were performed to characterize the electrical and optical properties of cubic GaN. The crystalline quality subsequently grown high-temperature (HT) cubic GaN layers strongly depended on thermal effects during the temperature ramping process after low temperature (LT) growth of the buffer layers. Atomic force microscope (AFM) and reflection high-energy electron diffraction (RHEED) were employed to investigate this temperature ramping process. Furthermore, the role of thermal treatment during the temperature ramping process was identified. Using the optimum buffer layer, the full width at half maxim (FWHM) at room temperature photoluminescence 5.6 nm was achieved. To our knowledge, this is the best FWHM value for cubic GaN to date. The background carrier concentration was as low as 3 x 10(13) cm(-3). (C) 2000 Published by Elsevier Science S.A. All rights reserved.

Identificador

http://ir.semi.ac.cn/handle/172111/12552

http://www.irgrid.ac.cn/handle/1471x/65246

Idioma(s)

英语

Fonte

Xu DP; Yang H; Li JB; Li SF; Zhao DG; Wang YT; Sun XL; Wu RH .Influences of initial buffer layer deposition on electrical and optical properties in cubic GaN grown on GaAs(100) by metalorganic chemical vapor deposition ,THIN SOLID FILMS,2000,368(2):279-282

Palavras-Chave #半导体材料 #cubic GaN #buffer layer #atomic force microscopy #reflection high-energy electron diffraction #MOVPE
Tipo

期刊论文