Determination of the interdiffusion coefficients of liquid Zn and Sn using Ta/Zn-Sn/Si trilayers


Autoria(s): Wang WK; Zhao JH
Data(s)

2001

Resumo

In this paper we present a new method for measuring diffusion coefficients in liquid metals under convection-less conditions with solid/liquid-liquid/solid trilayer. The advantage of this kind of trilayer is that effects from gravity-induced convection and Marangoni-convection can be omitted, so that the diffusion coefficient is determined more accurately. The Ta/Zn-Sn/Si trilayer were prepared with a multi-target ion-beam sputtering deposition technique and annealed in an electric furnace under an argon atmosphere. The interdiffusion of liquid zinc and tin at 500 degrees degree C was investigated. The diffusion concentration profiles were determined by energy dispersive spectroscopy. The interdiffusion coefficients range from 1.0x10(-6)cm(2)/s to 2.8x10(-6)cm(2)/s, which is less than previous values measured by capillary reservoir technique under 1g-environment where various convection exist. The precise interdiffusion coefficients of liquid zinc and tin result from the removing of disturbances of various kinds of convection.

Identificador

http://ir.semi.ac.cn/handle/172111/12052

http://www.irgrid.ac.cn/handle/1471x/64996

Idioma(s)

英语

Fonte

Wang WK; Zhao JH .Determination of the interdiffusion coefficients of liquid Zn and Sn using Ta/Zn-Sn/Si trilayers ,DIFFUSIONS IN MATERIALS:DIMAT2000,2001 ,PTS 1&2,194-1(0):883-889

Palavras-Chave #半导体材料 #convection-less condition #liquid metal diffusion #solid/liquid-liquid/solid trilayer
Tipo

期刊论文