Deep levels in semi-insulating InP obtained by annealing under iron phosphide ambiance


Autoria(s): Dong HW; Zhao YW; Zhang YH; Jiao JH; Zhao JQ; Lin LY
Data(s)

2002

Resumo

Deep levels in semi-insulating (SI) InP obtained by annealing in iron phosphide (IP) ambiance have been characterized by optical transient current spectroscopy (OTCS). Compared with the OTCS result of the SI InP prepared by annealing in pure phosphorus (PP) ambiance, the IP SI InP presents only two traps with activation energies of 0.20 and 0.63 eV, respectively. The results suggest that the diffusion of Fe-atoms suppresses the formation of a few defects in the IP SI InP. The nature of deep levels in the IP and PP SI InP has been discussed on the basis of these results. The relation between material property and defects in those SI InP has also been revealed. (C) 2002 American Institute of Physics.

Identificador

http://ir.semi.ac.cn/handle/172111/11834

http://www.irgrid.ac.cn/handle/1471x/64887

Idioma(s)

英语

Fonte

Dong HW; Zhao YW; Zhang YH; Jiao JH; Zhao JQ; Lin LY .Deep levels in semi-insulating InP obtained by annealing under iron phosphide ambiance ,JOURNAL OF APPLIED PHYSICS,2002,92 (4):1968-1970

Palavras-Chave #半导体物理 #FE-DOPED INP #SEMIINSULATING INP #UNDOPED INP #SPECTROSCOPY #WAFER #UNIFORMITY #PRESSURE #TRAPS
Tipo

期刊论文