Electron irradiation-induced defects in InP pre-annealed at high temperature


Autoria(s): Zhao YW (Zhao Y. W.); Dong ZY (Dong Z. Y.); Deng AH (Deng A. H.)
Data(s)

2006

Resumo

Electron irradiation-induced deep level defects have been studied in InP which has undergone high-temperature annealing in phosphorus and iron phosphide ambients, respectively. In contrast to a high concentration of irradiation-induced defects in as-grown and phosphorus ambient annealed InP, InP pre-annealed in iron phosphide ambient has a very low concentration of defects. The phenomenon has been explained in terms of a faster recombination of radiation-induced defects in the annealed InP. The radiation-induced defects in the annealed InP have been compared and studied. (c) 2006 Elsevier Ltd. All rights reserved.

Identificador

http://ir.semi.ac.cn/handle/172111/10546

http://www.irgrid.ac.cn/handle/1471x/64469

Idioma(s)

英语

Fonte

Zhao YW (Zhao Y. W.); Dong ZY (Dong Z. Y.); Deng AH (Deng A. H.) .Electron irradiation-induced defects in InP pre-annealed at high temperature ,MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING,2006 ,9(1-3):380-383

Palavras-Chave #半导体材料 #indium phosphide #defect #irradiation #THERMALLY STIMULATED CURRENT #UNDOPED SEMIINSULATING INP #DEEP-LEVEL DEFECTS #FRENKEL PAIRS #FE #SPECTROSCOPY #PHOSPHIDE #AMBIENT #TRAPS
Tipo

期刊论文