Ultrathin FBG pressure sensor with enhanced responsivity


Autoria(s): Zhang, WT (Zhang, W. T.); Li, F (Li, F.); Liu, YL (Liu, Y. L.); Liu, LH (Liu, L. H.)
Data(s)

2007

Resumo

An ultrathin fiber Bragg grating pressure sensor with enhanced sensitivity is demonstrated. A novel piston-like diaphragm with a hard core in the center is used as the sensing element to enhance the responsivity. Both the theoretical analysis and the experimental results show that the Young's modulus of the diaphragm and the radius of the hard core have significant effect on the pressure responsivity. By optimizing these two parameters, a pressure responsivity of 7 nm/MPa has been achieved.

Identificador

http://ir.semi.ac.cn/handle/172111/9230

http://www.irgrid.ac.cn/handle/1471x/64027

Idioma(s)

英语

Fonte

Zhang, WT (Zhang, W. T.); Li, F (Li, F.); Liu, YL (Liu, Y. L.); Liu, LH (Liu, L. H.) .Ultrathin FBG pressure sensor with enhanced responsivity ,IEEE PHOTONICS TECHNOLOGY LETTERS,SEP-OCT 2007,19 (17-20):1553-1555

Palavras-Chave #半导体器件 #diaphragm
Tipo

期刊论文