A selective area growth double stack active layer electroabsorption modulator integrated with a distributed feedback laser

A new method for fabricating electroabsorption modulator integrated with a distributed feedback laser (EML) was proposed. With the method we fabricated a selective area growth double stack active layer EML (SAG-DSAL-EML). Through comparing with other fabrication methods of EMLs, the characters and the merits of the new method presented in this paper were discussed.

National High-Tech Research and Development Program of China 2001AA312050 2005AA31g060 2007AA-03Z417 Supported by the National High-Tech Research and Development Program of China (Grant Nos. 2001AA312050, 2005AA31g060 and 2007AA-03Z417)