Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab
Data(s) |
2009
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Resumo |
We report on the design and fabrication of a photonic crystal (PC) channel drop filter based on an asymmetric silicon-on-insulator (SOI) slab. The filter is composed of two symmetric stick-shape micro-cavities between two single-line-defect (W1) waveguides in a triangular lattice, and the phase matching condition for the filter to improve the drop efficiency is satisfied by modifying the positions and radii of the air holes around the micro-cavities. A sample is then fabricated by using electron beam lithography (EBL) and inductively coupled plasma (ICP) etching processes. The measured 0 factor of the filter is about 1140, and the drop efficiency is estimated to be 73% +/- 5% by fitting the transmission spectrum. |
Identificador | |
Idioma(s) |
英语 |
Fonte |
Yu HJ ; Yu JZ ; Yu YD ; Chen SW .Design and Fabrication of a Photonic Crystal Channel Drop Filter Based on an Asymmetric Silicon-on-Insulator Slab ,JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY ,2009 ,9(2):974-977 |
Palavras-Chave | #半导体化学 #Photonic Crystal (PC) #Channel-Drop Filter #Silicon-on-Insulator (SOI) |
Tipo |
期刊论文 |