Effect of counterpart on the tribological behavior and tribo-induced phase transformation of Si


Autoria(s): Li XC; Lu JJ; Yang SR
Data(s)

2009

Resumo

The tribological behaviors and phase transformation of single crystal silicon against Si3N4, Ruby and steel were investigated in this study. It was found that the strong chemical action between silicon and Fe was the key factor to the tribological behavior of silicon as slid against steel. SEM and Raman spectroscopy indicated that phase transformation of single crystal silicon occurred during the running-in period at low sliding velocity as slid against Si3N4 and Ruby. and gave birth to single or a mixture phase of Si-III, Si-XII and amorphous silicon. The high hardness of counterpart and the absence of chemical action between silicon and counterpart facilitated the phase transformation of single crystal silicon. (C) 2008 Elsevier Ltd. All rights reserved.

National Science Foundation of China 50572107 50172052The authors are grateful to National Science Foundation of China (nos. 50572107 and 50172052) for financial supporting. The authors also thank Ms. Ke Zhu for the Raman testing.

Identificador

http://ir.semi.ac.cn/handle/172111/7253

http://www.irgrid.ac.cn/handle/1471x/63364

Idioma(s)

英语

Fonte

Li XC ; Lu JJ ; Yang SR .Effect of counterpart on the tribological behavior and tribo-induced phase transformation of Si ,TRIBOLOGY INTERNATIONAL,2009 ,42(5):628-633

Palavras-Chave #半导体物理 #Single crystal silicon #Phase transformation #Friction coefficient #Wear #Tribological counterpart
Tipo

期刊论文