Mechanical and tribological properties of epitaxial cubic boron nitride thin films grown on diamond


Autoria(s): Deyneka-Dupriez N; Herr U; Fecht HJ; Zhang XW; Yin H; Boyen HG; Ziemann P
Data(s)

2008

Resumo

电子邮箱nataliya.deyneka@uni-ulm.de

Identificador

http://ir.semi.ac.cn/handle/172111/6636

http://www.irgrid.ac.cn/handle/1471x/63056

Idioma(s)

英语

Fonte

Deyneka-Dupriez, N ; Herr, U ; Fecht, HJ ; Zhang, XW ; Yin, H ; Boyen, HG ; Ziemann, P .Mechanical and tribological properties of epitaxial cubic boron nitride thin films grown on diamond ,ADVANCED ENGINEERING MATERIALS,2008 ,10(5): 482-487

Palavras-Chave #半导体材料 #CHEMICAL-VAPOR-DEPOSITION
Tipo

期刊论文