Experimental investigation on submicron rib waveguide microring/racetrack resonators in silicon-on-insulator

in experiment, characteristics of silicon microring/racetrack resonators in submicron rib waveguides have been systematically investigated. It is demonstrated that only a transverse-electric mode is guided for a ratio of slab height to rib height h/H = 0.5. Thus, these microring/racetrack resonators can only function for quasi-transverse-electric mode, while they get rid of transverse-magnetic polarization. Electron beam lithography and inductively coupled plasma etching were employed and improved to reduce side-wall roughness for low propagation loss and high performance resonators. Then, the effects of waveguide dimensions, coupling region design, waveguide roughness, and oxide cladding for the resonators have been considered and analyzed. (C) 2008 Elsevier B.V. All rights reserved.

State Key Development Program for Basic Research of China 2006CB302803 2007CB613405 State High Technology Research and Development Program of China 2006AA03Z424 National Natural Science Foundation of China 60577044 The authors appreciate Dr. Han, Dr. Fan, Liu, Wang, and Wang at the Institute of Semiconductors, Chinese Academy of Sciences, for their constructive advice in the experiments. This work is supported by State Key Development Program for Basic Research of China (Grant Nos. 2006CB302803 and 2007CB613405). the State High Technology Research and Development Program of China (Grant No. 2006AA03Z424) and the National Natural Science Foundation of China (Grant No. 60577044).